Transmission-width-tunable silicon-photonic microelectromechanical ring resonator

Mustafa Ordu, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


A microring resonator with a transmission-width (Q-factor) tuning mechanism is proposed. The proposed resonator is composed of freestanding 320-nm-wide 340-nm-thick silicon waveguides, two waveguide couplers, and a 30-μm-wide 40-μm-long comb-drive actuator. The transmission width of the microring is tunable by varying the coupling rate of the couplers with the actuator. The transmission width was varied from 1.42 to 1.61 nm (Q-factor from 1100 to 970) by changing the actuator voltages from 9 to 11 V.

Original languageEnglish
Article number6626572
Pages (from-to)2236-2238
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number22
Publication statusPublished - 2013


  • Microring resonator
  • Si photonics
  • microelectromechanical systems
  • waveguide coupler

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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