Transmission-width-tunable silicon-photonic microelectromechanical ring resonator

Mustafa Ordu; Kazuhiro Hane

doi:10.1109/LPT.2013.2285130

Transmission-width-tunable silicon-photonic microelectromechanical ring resonator

Mustafa Ordu, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A microring resonator with a transmission-width (Q-factor) tuning mechanism is proposed. The proposed resonator is composed of freestanding 320-nm-wide 340-nm-thick silicon waveguides, two waveguide couplers, and a 30-μm-wide 40-μm-long comb-drive actuator. The transmission width of the microring is tunable by varying the coupling rate of the couplers with the actuator. The transmission width was varied from 1.42 to 1.61 nm (Q-factor from 1100 to 970) by changing the actuator voltages from 9 to 11 V.

Original language	English
Article number	6626572
Pages (from-to)	2236-2238
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	25
Issue number	22
DOIs	https://doi.org/10.1109/LPT.2013.2285130
Publication status	Published - 2013

Keywords

Microring resonator
Si photonics
microelectromechanical systems
waveguide coupler

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/LPT.2013.2285130

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@article{50b35cd0c0704ddfb1de4d936b900bef,

title = "Transmission-width-tunable silicon-photonic microelectromechanical ring resonator",

abstract = "A microring resonator with a transmission-width (Q-factor) tuning mechanism is proposed. The proposed resonator is composed of freestanding 320-nm-wide 340-nm-thick silicon waveguides, two waveguide couplers, and a 30-μm-wide 40-μm-long comb-drive actuator. The transmission width of the microring is tunable by varying the coupling rate of the couplers with the actuator. The transmission width was varied from 1.42 to 1.61 nm (Q-factor from 1100 to 970) by changing the actuator voltages from 9 to 11 V.",

keywords = "Microring resonator, Si photonics, microelectromechanical systems, waveguide coupler",

author = "Mustafa Ordu and Kazuhiro Hane",

year = "2013",

doi = "10.1109/LPT.2013.2285130",

language = "English",

volume = "25",

pages = "2236--2238",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "22",

}

TY - JOUR

T1 - Transmission-width-tunable silicon-photonic microelectromechanical ring resonator

AU - Ordu, Mustafa

AU - Hane, Kazuhiro

PY - 2013

Y1 - 2013

N2 - A microring resonator with a transmission-width (Q-factor) tuning mechanism is proposed. The proposed resonator is composed of freestanding 320-nm-wide 340-nm-thick silicon waveguides, two waveguide couplers, and a 30-μm-wide 40-μm-long comb-drive actuator. The transmission width of the microring is tunable by varying the coupling rate of the couplers with the actuator. The transmission width was varied from 1.42 to 1.61 nm (Q-factor from 1100 to 970) by changing the actuator voltages from 9 to 11 V.

AB - A microring resonator with a transmission-width (Q-factor) tuning mechanism is proposed. The proposed resonator is composed of freestanding 320-nm-wide 340-nm-thick silicon waveguides, two waveguide couplers, and a 30-μm-wide 40-μm-long comb-drive actuator. The transmission width of the microring is tunable by varying the coupling rate of the couplers with the actuator. The transmission width was varied from 1.42 to 1.61 nm (Q-factor from 1100 to 970) by changing the actuator voltages from 9 to 11 V.

KW - Microring resonator

KW - Si photonics

KW - microelectromechanical systems

KW - waveguide coupler

UR - http://www.scopus.com/inward/record.url?scp=84887281359&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84887281359&partnerID=8YFLogxK

U2 - 10.1109/LPT.2013.2285130

DO - 10.1109/LPT.2013.2285130

M3 - Article

AN - SCOPUS:84887281359

SN - 1041-1135

VL - 25

SP - 2236

EP - 2238

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 22

M1 - 6626572

ER -

Transmission-width-tunable silicon-photonic microelectromechanical ring resonator

Abstract

Keywords

ASJC Scopus subject areas

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