Abstract
We propose a transmitted diffraction grating utilizing high diffraction order, which is useful for a spectrometer. In this paper, this grating is designed, fabricated and measured. This transmitted diffraction grating was designed as a shape of a triangular-groove consisting of reflective and refractive surface, not two refractive surfaces. The replica of this grating can be fabricated through hot-embossing process using a triangular-groove mould. Finally, this grating consisting of reflective and refractive surfaces can be obtained using shadowing effect in thermal evaporation process, which can help to coat metal on only one surface, not the other surface. Since each groove in this grating consists of reflective surface at one side and refractive surface at the other side, there are two high diffraction orders. Using the period of 3 μm and the thickness of 2.119 μm in visible wavelength, a -4th and -10th diffraction order occur. Considering the high diffraction order can provide high resolving power in a spectrometer, this grating is very applicable to a compact and slim spectrometer.
Original language | English |
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Title of host publication | Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 |
Publisher | euspen |
Pages | 50-53 |
Number of pages | 4 |
Volume | 2 |
ISBN (Electronic) | 9780955308260 |
Publication status | Published - 2009 Jan 1 |
Event | 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain Duration: 2009 Jun 2 → 2009 Jun 5 |
Other
Other | 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 |
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Country/Territory | Spain |
City | San Sebastian |
Period | 09/6/2 → 09/6/5 |
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
- Instrumentation
- Mechanical Engineering
- Materials Science(all)
- Environmental Engineering