Tunable vertical comb for driving micromirror realized by bending device wafer

Minoru Sasaki; Masahiro Ishimori; Jonghyeong Song; Kazuhiro Hane

doi:10.1093/ietele/e90-c.1.147

Tunable vertical comb for driving micromirror realized by bending device wafer

Minoru Sasaki, Masahiro Ishimori, Jonghyeong Song, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Tohoku University

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.

Original language	English
Pages (from-to)	147-148
Number of pages	2
Journal	IEICE Transactions on Electronics
Volume	E90-C
Issue number	1
DOIs	https://doi.org/10.1093/ietele/e90-c.1.147
Publication status	Published - 2007 Jan

Keywords

Micromirror
Tuning
Vertical comb
Wafer bending

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10.1093/ietele/e90-c.1.147

Cite this

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abstract = "An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.",

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author = "Minoru Sasaki and Masahiro Ishimori and Jonghyeong Song and Kazuhiro Hane",

year = "2007",

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AU - Sasaki, Minoru

AU - Ishimori, Masahiro

AU - Song, Jonghyeong

AU - Hane, Kazuhiro

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N2 - An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.

AB - An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.

KW - Micromirror

KW - Tuning

KW - Vertical comb

KW - Wafer bending

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Tunable vertical comb for driving micromirror realized by bending device wafer

Abstract

Keywords

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