Two dimensional automatic alignment of pinhole integrated with photodiode

M. Sasaki; W. Kamada; K. Hane

doi:10.1109/IMNC.1999.797543

Two dimensional automatic alignment of pinhole integrated with photodiode

M. Sasaki, W. Kamada, K. Hane

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The authors use apparatus in which a Si micromachined pinhole surrounded by photodiode cells is used for automatic alignment. When the laser beam is apart from the pinhole and incident on the photodiode cells placed around it, the relative position of the laser spot from the pinhole can be found by comparing the photocurrents obtained from four photodiode cells. Using this signal as the input of the feedback control, actuators move the pinhole so that the laser beam can pass through the pinhole. In our previous study (1998), a one dimensional version of the automatic alignment was achieved using a Si micromachined pinhole and shape memory alloy actuators. In this study, two dimensional automatic alignment is described.

Original language	English
Title of host publication	1999 International Microprocesses and Nanotechnology Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	194-195
Number of pages	2
ISBN (Electronic)	4930813972, 9784930813978
DOIs	https://doi.org/10.1109/IMNC.1999.797543
Publication status	Published - 1999 Jan 1
Event	1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan Duration: 1999 Jul 6 → 1999 Jul 8

Publication series

Name	1999 International Microprocesses and Nanotechnology Conference

Other

Other	1999 International Microprocesses and Nanotechnology Conference
Country/Territory	Japan
City	Yokohama
Period	99/7/6 → 99/7/8

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/IMNC.1999.797543

Cite this

Sasaki, M., Kamada, W., & Hane, K. (1999). Two dimensional automatic alignment of pinhole integrated with photodiode. In 1999 International Microprocesses and Nanotechnology Conference (pp. 194-195). [797543] (1999 International Microprocesses and Nanotechnology Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1999.797543

Two dimensional automatic alignment of pinhole integrated with photodiode. / Sasaki, M.; Kamada, W.; Hane, K.

1999 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc., 1999. p. 194-195 797543 (1999 International Microprocesses and Nanotechnology Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sasaki, M, Kamada, W & Hane, K 1999, Two dimensional automatic alignment of pinhole integrated with photodiode. in 1999 International Microprocesses and Nanotechnology Conference., 797543, 1999 International Microprocesses and Nanotechnology Conference, Institute of Electrical and Electronics Engineers Inc., pp. 194-195, 1999 International Microprocesses and Nanotechnology Conference, Yokohama, Japan, 99/7/6. https://doi.org/10.1109/IMNC.1999.797543

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title = "Two dimensional automatic alignment of pinhole integrated with photodiode",

abstract = "The authors use apparatus in which a Si micromachined pinhole surrounded by photodiode cells is used for automatic alignment. When the laser beam is apart from the pinhole and incident on the photodiode cells placed around it, the relative position of the laser spot from the pinhole can be found by comparing the photocurrents obtained from four photodiode cells. Using this signal as the input of the feedback control, actuators move the pinhole so that the laser beam can pass through the pinhole. In our previous study (1998), a one dimensional version of the automatic alignment was achieved using a Si micromachined pinhole and shape memory alloy actuators. In this study, two dimensional automatic alignment is described.",

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N2 - The authors use apparatus in which a Si micromachined pinhole surrounded by photodiode cells is used for automatic alignment. When the laser beam is apart from the pinhole and incident on the photodiode cells placed around it, the relative position of the laser spot from the pinhole can be found by comparing the photocurrents obtained from four photodiode cells. Using this signal as the input of the feedback control, actuators move the pinhole so that the laser beam can pass through the pinhole. In our previous study (1998), a one dimensional version of the automatic alignment was achieved using a Si micromachined pinhole and shape memory alloy actuators. In this study, two dimensional automatic alignment is described.

AB - The authors use apparatus in which a Si micromachined pinhole surrounded by photodiode cells is used for automatic alignment. When the laser beam is apart from the pinhole and incident on the photodiode cells placed around it, the relative position of the laser spot from the pinhole can be found by comparing the photocurrents obtained from four photodiode cells. Using this signal as the input of the feedback control, actuators move the pinhole so that the laser beam can pass through the pinhole. In our previous study (1998), a one dimensional version of the automatic alignment was achieved using a Si micromachined pinhole and shape memory alloy actuators. In this study, two dimensional automatic alignment is described.

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Two dimensional automatic alignment of pinhole integrated with photodiode

Abstract

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Other

ASJC Scopus subject areas

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