Abstract
The automatic alignment of a pinhole is realized in two dimensions and its function as a spatial filter is confirmed. A pinhole device surrounded by four photodiode cells fabricated by Si micromachining techniques is placed on a movable xy stage which consists of four shape-memory-alloy actuators. The feedback control based on the signal obtained from the integrated photodiode is confirmed to be feasible for aligning a pinhole in two dimensions even if the shape-memory-alloy actuators are disadvantageous for controlling its displacement including cross-interaction. The spatial filtering function of an automatically aligned pinhole is confirmed.
| Original language | English |
|---|---|
| Pages (from-to) | 7190-7193 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 38 |
| Issue number | 12 B |
| DOIs | |
| Publication status | Published - 1999 |
Keywords
- Automatic alignment
- Photodiode
- Pinhole
- Shape-memory-alloy
- Si micromachining