Two-dimensional detector for high resolution soft X-ray imaging

Takeo Ejima, Shodo Ogasawara, Tadashi Hatano, Mihiro Yanagihara, Masaki Yamamoto

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Citations (Scopus)

Abstract

A new two-dimensional (2D) detector for detecting soft X-ray (SX) images was developed. The detector has a scintillator plate to convert a SX image into a visible (VI) one, and a relay optics to magnify and detect the converted VI image. In advance of the fabrication of the detector, quantum efficiencies of scintillators were investigated. As a result, a Ce:LYSO single crystal on which Zr thin film was deposited was used as an image conversion plate. The spatial resolution of fabricated detector is 3.0 μm, and the wavelength range which the detector has sensitivity is 30-6nm region.

Original languageEnglish
Title of host publicationSRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation
Pages811-814
Number of pages4
DOIs
Publication statusPublished - 2010
Event10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009 - Melbourne, VIC, Australia
Duration: 2009 Sept 272009 Oct 2

Publication series

NameAIP Conference Proceedings
Volume1234
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009
Country/TerritoryAustralia
CityMelbourne, VIC
Period09/9/2709/10/2

Keywords

  • high spatial resolution
  • quantum efficiency
  • scintillator
  • two dimensional detector

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