Two-dimensional metallic tungsten nanowire network fabricated by electron-beam-induced deposition

One-dimensional tungsten nanowires and two-dimensional tungsten nanowire networks were fabricated on a tungsten substrate by using electron-beam-induced deposition (EBID) without precursor injection. The as-prepared tungsten nanostructures were studied using a combination of energy-dispersive x-ray spectroscopy and selected area electron diffraction. It was revealed that the tungsten nanostructures were composed of pure metallic tungsten. The WO ₃ oxide formed in the chemical preparation of tungsten foils was probably the source of tungsten for the fabrication of tungsten nanostructures by EBID.