Abstract
Two-port type rf integrated inductor with on-top magnetic layer was fabricated. Equivalent circuit analysis of the ferromagnetic RF integrated inductor was performed for the first time. Structure of the possible equivalent circuit is proposed. Parasitic capacitance of the ferromagnetic film is negligibly small if the film is applied slits. Ferromagnetic Co85Nb12Zr3 film with slits effectively enhanced the inductance up to 5 GHz.
Original language | English |
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Pages (from-to) | 197-200 |
Number of pages | 4 |
Journal | IEEE MTT-S International Microwave Symposium Digest |
Volume | 1 |
Publication status | Published - 2002 Jan 1 |
Event | 2002 IEEE MTT-S International Microwave Symposium Digest - Seattle, WA, United States Duration: 2002 Jun 2 → 2002 Jun 7 |
ASJC Scopus subject areas
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering