TY - JOUR
T1 - Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes
AU - Ezoe, Yuichiro
AU - Mitsuishi, Ikuyuki
AU - Takagi, Utako
AU - Koshiishi, Masaki
AU - Mitsuda, Kazuhisa
AU - Yamasaki, Noriko Y.
AU - Ohashi, Takaya
AU - Kato, Fumiki
AU - Sugiyama, Susumu
AU - Riveros, Raul E.
AU - Yamaguchi, Hitomi
AU - Fujihira, Shinya
AU - Kanamori, Yoshiaki
AU - Morishita, Kohei
AU - Nakajima, Kazuo
AU - Maeda, Ryutaro
PY - 2010/8/1
Y1 - 2010/8/1
N2 - We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. In our method, curvilinear micro pore structures are firstly fabricated by silicon deep reactive ion etching (DRIE) or X-ray LIGA processes. Secondly, side walls of the micro structures are smoothed by magnetic field assisted finishing and/or hydrogen annealing techniques for high reflectivity mirrors. Thirdly, to focus parallel X-ray lights from astronomical objects, these structures are elastically or plastically bent into a spherical shape. Fourthly, the bent structures are stacked to form a multistage X-ray telescope. In this paper, we report on fabrication and X-ray reflection tests of silicon and nickel X-ray mirrors using the DRIE and LIGA processes, respectively. For the first time, X-ray reflections were confirmed on both of the mirrors. Estimated rms roughnesses were 5 nm and 3 nm for the silicon and nickel mirrors, respectively.
AB - We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. In our method, curvilinear micro pore structures are firstly fabricated by silicon deep reactive ion etching (DRIE) or X-ray LIGA processes. Secondly, side walls of the micro structures are smoothed by magnetic field assisted finishing and/or hydrogen annealing techniques for high reflectivity mirrors. Thirdly, to focus parallel X-ray lights from astronomical objects, these structures are elastically or plastically bent into a spherical shape. Fourthly, the bent structures are stacked to form a multistage X-ray telescope. In this paper, we report on fabrication and X-ray reflection tests of silicon and nickel X-ray mirrors using the DRIE and LIGA processes, respectively. For the first time, X-ray reflections were confirmed on both of the mirrors. Estimated rms roughnesses were 5 nm and 3 nm for the silicon and nickel mirrors, respectively.
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U2 - 10.1007/s00542-009-0981-4
DO - 10.1007/s00542-009-0981-4
M3 - Article
AN - SCOPUS:77955325570
SN - 0946-7076
VL - 16
SP - 1633
EP - 1641
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 8-9
ER -