@article{5fe7027537ab4390bf7fc18ea0943edb,
title = "Ultra-low dielectric properties of porous polyimide thin films fabricated by using the two kinds of templates with different particle sizes",
abstract = "Porous polyimide (PI) thin films have been fabricated successfully by using silica microparticles (MPs) with different particle sizes as a template, and the three dimensional porous structure has been observed clearly by mean of transmission electron microtomography. The measured values of dielectric constant (ε) decreased remarkably by introducing a porous structure, compared with ordinary PI thin films. Especially, the porosity evidently increased (ca. 10%) by suitably employing silica MPs having different particle sizes, and then the value of ε was further reduced. Bruggeman model could reproduce nearly the relationship between the value of ε and porosity.",
keywords = "Bruggeman model, Dielectric constant, Electron tomography, Polyamic acid, Polyimide, Porosity, Porous structure, Silica microparticles",
author = "Yumi Kourakata and Tsunenobu Onodera and Hitoshi Kasai and Hiroshi Jinnai and Hidetoshi Oikawa",
note = "Funding Information: The authors wish to thank Dr. Takeshi Higuchi (IMRAM, Tohoku University at that time) for carrying out electron tomography. H. J. acknowledges partial support by Japan Society for the Promotion of Science (JSPS) KAKENKI, Japan (Grant No. 19H00905), and Japan Science and Technology Agent (JST) Core Research for Evolutional Science and Technology (CREST), Japan (Grant No. JPMJCR1993). Funding Information: The authors wish to thank Dr. Takeshi Higuchi (IMRAM, Tohoku University at that time) for carrying out electron tomography. H. J. acknowledges partial support by Japan Society for the Promotion of Science (JSPS) KAKENKI, Japan (Grant No. 19H00905 ), and Japan Science and Technology Agent (JST) Core Research for Evolutional Science and Technology (CREST), Japan (Grant No. JPMJCR1993 ). Publisher Copyright: {\textcopyright} 2020 Elsevier Ltd",
year = "2021",
month = jan,
day = "6",
doi = "10.1016/j.polymer.2020.123115",
language = "English",
volume = "212",
journal = "Polymer",
issn = "0032-3861",
publisher = "Elsevier BV",
}