@inproceedings{93762498bf7744e49625972e901f0100,
title = "Ultra-precision scanning tunneling microscope for measurement of high-aspect ratio structures",
abstract = "This paper presents an ultra-precision STM system that consists of an STM probe, a long stroke PZT actuator, and a linear encoder. The linear encoder yields a resolution of 0.5 nm over a full stroke of the actuator (70 μm), generating a dynamic range of 102.9 dB. The linearity error of the developed STM system is smaller than 5 nm over a range of 50 μm. Measurement experiment was carried out by using the STM system. The result was compared with that of using an AFM and that by a commercial SEM.",
keywords = "3D micro-structure, Precision, SPM, STM",
author = "Shigeaki Goto and Wei Gao",
year = "2010",
language = "English",
isbn = "9781617820199",
series = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010",
pages = "489--492",
booktitle = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010",
note = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 ; Conference date: 05-09-2010 Through 09-09-2010",
}