Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

Yuki Shimizu; Siew Leng Tan; Dai Murata; Taiji Maruyama; So Ito; Yuan Liu Chen; Wei Gao

doi:10.1364/OE.24.002788

Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

Yuki Shimizu, Siew Leng Tan, Dai Murata, Taiji Maruyama, So Ito, Yuan Liu Chen, Wei Gao

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

37 Citations (Scopus)

Abstract

An ultra-sensitive angle sensor employing single-cell photodiodes, which allows tighter focusing leading to a higher angular resolution better than 0.001 arc-second, has been designed based on laser autocollimation. Aiming to investigate the influences of spherical aberrations in the optical system on the sensor sensitivity, an optical model has been established based on wave optics. Computer simulation has been carried out by using the model, and its feasibility has been verified in experiments. In addition, a prototype optical angle sensor has been designed in a compact size of 100 mm × 150 mm, and its measurement resolution has been verified in experiments.

Original language	English
Pages (from-to)	2788-2805
Number of pages	18
Journal	Optics Express
Volume	24
Issue number	3
DOIs	https://doi.org/10.1364/OE.24.002788
Publication status	Published - 2016 Feb 8

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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abstract = "An ultra-sensitive angle sensor employing single-cell photodiodes, which allows tighter focusing leading to a higher angular resolution better than 0.001 arc-second, has been designed based on laser autocollimation. Aiming to investigate the influences of spherical aberrations in the optical system on the sensor sensitivity, an optical model has been established based on wave optics. Computer simulation has been carried out by using the model, and its feasibility has been verified in experiments. In addition, a prototype optical angle sensor has been designed in a compact size of 100 mm × 150 mm, and its measurement resolution has been verified in experiments.",

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AU - Tan, Siew Leng

AU - Murata, Dai

AU - Maruyama, Taiji

AU - Ito, So

AU - Chen, Yuan Liu

AU - Gao, Wei

N1 - Funding Information: Acknowledgments This research was supported by the Japan Society for the Promotion of Science (JSPS), Mazak Foundation and Mitutoyo Science Foundation. Publisher Copyright: © 2016 Optical Society of America.

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Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

Abstract

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