Ultra-small micro encoder and its application to doppler sensor

Renshi Sawada, Eiji Higurashi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)778-782
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Issue number9
Publication statusPublished - 2016
Externally publishedYes


  • Doppler sensor
  • Encoder
  • Laser diode
  • MEMS
  • Optical sensor
  • Wafer-level package

ASJC Scopus subject areas

  • Mechanical Engineering

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