Ultra wide band resonator composed of grooved Cu-electrode on LiNbO 3 and its application to tunable filter

Michio Kadota, Tetsuya Kimura, Yasuyuki Ida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

21 Citations (Scopus)


A leaky surface acoustic wave (LSAW) on 0-15° YX-LiNbO3 has a large electro-mecahnical coupling factor, but it has a leaky component. The LSAW changes to Love wave without its leaky component, by using a high density metal electrode with a low velocity such as Au and Cu on that substrate. It was reported that a resonator composed of a Cu-electrode/15° YX-LiNbO 3 had wide bandwidth of 12%. This time, in order to obtain a resonator with a wider bandwidth, authors attempted to fabricate one-port resonators composed of a grooved Cu-electrode/4° YX-LiNbO3. As the result, this resonator had a wider bandwidth of 17% of 1.3 times and higher resonant and anti-resonant frequencies of 1.3 times than the resonator composed of a conventional type of same thick Cu-electrode on 4° YX-LiNbO3 for reference. Authors proposed to apply this resonator to a tunable filter. As the result, the tunable filter having tunable range of 7% in center frequency was realized.

Original languageEnglish
Title of host publication2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Print)9781424443895
Publication statusPublished - 2009
Event2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
Duration: 2009 Sept 202009 Sept 23

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117


Other2009 IEEE International Ultrasonics Symposium, IUS 2009


  • Grooved Cu-electrode
  • LiNbO
  • Resonator
  • Tunable filter
  • Ultra wide band

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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