Abstract
Ultrafast laser ablation was applied to process 10-nm self-supporting membranes. The membranes were processed over tens of square micrometers by single-shot irradiation of two visible laser pulses, followed by the realization of periodic sub-microstructures. The fabricated geometry is dependent on the intensity distribution of the superposed input pulses, providing flexibility and facilitating practical micro- and nanoengineering. Ease of designing the processing parameters and speed of processing are the significant advantages of this method compared to focused ion beam (FIB) milling.
Original language | English |
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Pages (from-to) | 26200-26206 |
Number of pages | 7 |
Journal | Optics Express |
Volume | 28 |
Issue number | 18 |
DOIs | |
Publication status | Published - 2020 Aug 31 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics