Ultrafast photoconductive swiches integrated with electrical waveguides of low-k polyimide

Shuichi Yagi, Taro Itatani, Hitoshi Kawanami, Sucheta Gorwadkar, Takayuki Uemura, Takafumi Fukushima, Hiroshi Itatani, Masao Tomoi, Munecazu Tacano

Research output: Contribution to journalConference articlepeer-review


We have fabricated ultrafast electrical waveguides with low-k polyimide integrated with ultrafast photoconductive switches formed by nano-anodization process for the first time. Electrical signals are affected by nonlinear capacitance of p-n junctions in this waveguides, and pass through the low-k polyimide, so the dielectric loss and the radiation loss are dramatically reduced. The electrical pulses as short as 290 fs were measured on this waveguide by an electro-optic sampling system based on a femtosecond laser.

Original languageEnglish
Pages (from-to)623-632
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2002
EventAplications of Photonic Technology - Quebec City, Canada
Duration: 2002 Jun 12002 Jun 6


  • Femto
  • Low-k
  • Polyimide
  • Ultrafast photoconductive


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