Ultrasensitive Si nanowire probe for magnetic resonance detection

Yong Jun Seo; Masaya Toda; Yusuke Kawai; Takahito Ono

doi:10.1109/MEMSYS.2014.6765596

Ultrasensitive Si nanowire probe for magnetic resonance detection

Yong Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

ENG - Mechanical Systems Engineering

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

In this study, we have fabricated a 210 nm-wide and 32 μm-long Si nanowire probe with a Si mirror from a silicon-on-insulator wafer. Additionally, a Nd-Fe-B magnet is mounteded at the end of the nanowire for magnetic force detection in MRFM measurements. The fabricated probe shows a resonance frequency f₀ of 11.256 kHz and a Q factor of 12000 after annealing at 800 ^oC for 2 hours in forming gas. The probe exhibits atto-newton sensitivity, and the measurement of force mapping based on electron spin resonance is demonstrated for three-dimensional imaging of radical density. The detected force is approximately 8.5 aN at room temperature.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	151-154
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765596
Publication status	Published - 2014
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 2014 Jan 26 → 2014 Jan 30

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

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10.1109/MEMSYS.2014.6765596

Cite this

Seo, Y. J., Toda, M., Kawai, Y., & Ono, T. (2014). Ultrasensitive Si nanowire probe for magnetic resonance detection. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 151-154). Article 6765596 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765596

Seo, Yong Jun ; Toda, Masaya ; Kawai, Yusuke et al. / Ultrasensitive Si nanowire probe for magnetic resonance detection. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 151-154 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Ultrasensitive Si nanowire probe for magnetic resonance detection",

abstract = "In this study, we have fabricated a 210 nm-wide and 32 μm-long Si nanowire probe with a Si mirror from a silicon-on-insulator wafer. Additionally, a Nd-Fe-B magnet is mounteded at the end of the nanowire for magnetic force detection in MRFM measurements. The fabricated probe shows a resonance frequency f0 of 11.256 kHz and a Q factor of 12000 after annealing at 800 oC for 2 hours in forming gas. The probe exhibits atto-newton sensitivity, and the measurement of force mapping based on electron spin resonance is demonstrated for three-dimensional imaging of radical density. The detected force is approximately 8.5 aN at room temperature.",

author = "Seo, {Yong Jun} and Masaya Toda and Yusuke Kawai and Takahito Ono",

year = "2014",

doi = "10.1109/MEMSYS.2014.6765596",

language = "English",

isbn = "9781479935086",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "151--154",

booktitle = "MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems",

address = "United States",

note = "27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",

}

Seo, YJ, Toda, M, Kawai, Y & Ono, T 2014, Ultrasensitive Si nanowire probe for magnetic resonance detection. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765596, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 151-154, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765596

Ultrasensitive Si nanowire probe for magnetic resonance detection. / Seo, Yong Jun; Toda, Masaya; Kawai, Yusuke et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 151-154 6765596 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Ultrasensitive Si nanowire probe for magnetic resonance detection

AU - Seo, Yong Jun

AU - Toda, Masaya

AU - Kawai, Yusuke

AU - Ono, Takahito

PY - 2014

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N2 - In this study, we have fabricated a 210 nm-wide and 32 μm-long Si nanowire probe with a Si mirror from a silicon-on-insulator wafer. Additionally, a Nd-Fe-B magnet is mounteded at the end of the nanowire for magnetic force detection in MRFM measurements. The fabricated probe shows a resonance frequency f0 of 11.256 kHz and a Q factor of 12000 after annealing at 800 oC for 2 hours in forming gas. The probe exhibits atto-newton sensitivity, and the measurement of force mapping based on electron spin resonance is demonstrated for three-dimensional imaging of radical density. The detected force is approximately 8.5 aN at room temperature.

AB - In this study, we have fabricated a 210 nm-wide and 32 μm-long Si nanowire probe with a Si mirror from a silicon-on-insulator wafer. Additionally, a Nd-Fe-B magnet is mounteded at the end of the nanowire for magnetic force detection in MRFM measurements. The fabricated probe shows a resonance frequency f0 of 11.256 kHz and a Q factor of 12000 after annealing at 800 oC for 2 hours in forming gas. The probe exhibits atto-newton sensitivity, and the measurement of force mapping based on electron spin resonance is demonstrated for three-dimensional imaging of radical density. The detected force is approximately 8.5 aN at room temperature.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems

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Seo YJ, Toda M, Kawai Y, Ono T. Ultrasensitive Si nanowire probe for magnetic resonance detection. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 151-154. 6765596. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765596

Ultrasensitive Si nanowire probe for magnetic resonance detection

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