Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

So Ito; Yuan Liu Chen; Yuki Shimizu; Hirotaka Kikuchi; Wei Gao; Kazuhiko Takahashi; Toshihiko Kanayama; Kunmei Arakawa; Atsushi Hayashi

doi:10.1016/j.precisioneng.2015.09.016

Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

So Ito, Yuan Liu Chen, Yuki Shimizu, Hirotaka Kikuchi, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm.

Original language	English
Pages (from-to)	525-529
Number of pages	5
Journal	Precision Engineering
Volume	43
DOIs	https://doi.org/10.1016/j.precisioneng.2015.09.016
Publication status	Published - 2016 Jan

Keywords

Force
Metrology
Probe

Access to Document

10.1016/j.precisioneng.2015.09.016

Cite this

@article{e2fa53e24e1a42c1b43bb8d1bd279f8a,

title = "Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system",

abstract = "A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm.",

keywords = "Force, Metrology, Probe",

author = "So Ito and Chen, {Yuan Liu} and Yuki Shimizu and Hirotaka Kikuchi and Wei Gao and Kazuhiko Takahashi and Toshihiko Kanayama and Kunmei Arakawa and Atsushi Hayashi",

note = "Funding Information: This research is supported by a Grant-in-aid from JSPS (Japan Society for the Promotion of Science). Publisher Copyright: {\textcopyright} 2015 Elsevier Inc. All rights reserved.",

year = "2016",

month = jan,

doi = "10.1016/j.precisioneng.2015.09.016",

language = "English",

volume = "43",

pages = "525--529",

journal = "Precision Engineering",

issn = "0141-6359",

publisher = "Elsevier Inc.",

}

TY - JOUR

T1 - Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

AU - Ito, So

AU - Chen, Yuan Liu

AU - Shimizu, Yuki

AU - Kikuchi, Hirotaka

AU - Gao, Wei

AU - Takahashi, Kazuhiko

AU - Kanayama, Toshihiko

AU - Arakawa, Kunmei

AU - Hayashi, Atsushi

PY - 2016/1

Y1 - 2016/1

N2 - A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm.

AB - A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm.

KW - Force

KW - Metrology

KW - Probe

UR - http://www.scopus.com/inward/record.url?scp=84948682441&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84948682441&partnerID=8YFLogxK

U2 - 10.1016/j.precisioneng.2015.09.016

DO - 10.1016/j.precisioneng.2015.09.016

M3 - Article

AN - SCOPUS:84948682441

SN - 0141-6359

VL - 43

SP - 525

EP - 529

JO - Precision Engineering

JF - Precision Engineering

ER -

Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this