TY - JOUR
T1 - Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor
AU - Wang, Min
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2015 IOP Publishing Ltd.
PY - 2015/8/1
Y1 - 2015/8/1
N2 - This paper reports an uncooled infrared (IR) thermal imaging sensor using europium phosphor, Eu(TTA)3, as a temperature-sensitive medium. An Eu(TTA)3 thin film was evaporated and deposited on a thermally isolated microstructure made of SU-8. The temperature dependency of luminescence from Eu(TTA)3 was used to convert the IR radiation power into visible-light intensity, which can be captured and digitized by a charge-coupled device (CCD) camera. The temperature coefficient of luminescence from the evaporated Eu(TTA)3 was -2.1 ± 0.4% K-1. Thermal images of a heater at 75-370 °C were acquired via a Ge lens. The minimum detectable temperature, noise-equivalent temperature difference (NETD), and thermal response time were measured as 75 °C, 2.66 K at 370 °C, and 0.2 s, respectively.
AB - This paper reports an uncooled infrared (IR) thermal imaging sensor using europium phosphor, Eu(TTA)3, as a temperature-sensitive medium. An Eu(TTA)3 thin film was evaporated and deposited on a thermally isolated microstructure made of SU-8. The temperature dependency of luminescence from Eu(TTA)3 was used to convert the IR radiation power into visible-light intensity, which can be captured and digitized by a charge-coupled device (CCD) camera. The temperature coefficient of luminescence from the evaporated Eu(TTA)3 was -2.1 ± 0.4% K-1. Thermal images of a heater at 75-370 °C were acquired via a Ge lens. The minimum detectable temperature, noise-equivalent temperature difference (NETD), and thermal response time were measured as 75 °C, 2.66 K at 370 °C, and 0.2 s, respectively.
KW - Eu(TTA)<inf>3</inf>
KW - infrared thermal imaging sensor
KW - IR-to-visible conversion
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U2 - 10.1088/0960-1317/25/8/085001
DO - 10.1088/0960-1317/25/8/085001
M3 - Article
AN - SCOPUS:84938056035
SN - 0960-1317
VL - 25
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 8
M1 - 085001
ER -