Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor

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6 Citations (Scopus)


This paper reports an uncooled infrared (IR) thermal imaging sensor using europium phosphor, Eu(TTA)3, as a temperature-sensitive medium. An Eu(TTA)3 thin film was evaporated and deposited on a thermally isolated microstructure made of SU-8. The temperature dependency of luminescence from Eu(TTA)3 was used to convert the IR radiation power into visible-light intensity, which can be captured and digitized by a charge-coupled device (CCD) camera. The temperature coefficient of luminescence from the evaporated Eu(TTA)3 was -2.1 ± 0.4% K-1. Thermal images of a heater at 75-370 °C were acquired via a Ge lens. The minimum detectable temperature, noise-equivalent temperature difference (NETD), and thermal response time were measured as 75 °C, 2.66 K at 370 °C, and 0.2 s, respectively.

Original languageEnglish
Article number085001
JournalJournal of Micromechanics and Microengineering
Issue number8
Publication statusPublished - 2015 Aug 1


  • Eu(TTA)<inf>3</inf>
  • infrared thermal imaging sensor
  • IR-to-visible conversion


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