Abstract
The temperature dependence of the upper yield stress in dislocation-free Czochralski-grown silicon (CZ-Si) and float-zone-grown silicon (FZ-Si) crystals and an FZ-Si crystal of grown-in dislocations of 2 × 104 cm-2 were obtained at temperatures close to the melting point. The result is compared with those reported at lower temperatures to provide a fundamental knowledge for wafer processing and crystal growth.
Original language | English |
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Pages (from-to) | L176-L178 |
Journal | Journal of the Electrochemical Society |
Volume | 143 |
Issue number | 8 |
DOIs | |
Publication status | Published - 1996 Aug |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Renewable Energy, Sustainability and the Environment
- Surfaces, Coatings and Films
- Electrochemistry
- Materials Chemistry