@article{f1714d6a483c4910af17a6c23eb0aa3f,
title = "Vacancy color stress sensing with embedded diamond particles on Si micro-cantilevers",
abstract = "Monitoring a peak shift in the photoluminescence (PL) spectrum of nitrogen vacancy (NV) with the embedded nano-diamonds (NDs) indicates the stress change on the Si micro-cantilever resonator. There is a clear peak splitting under static magnet field, and showing the peak shift by applied periodic compressive and tensile stresses. The NDs have been simply embedded on the Si micro-cantilever by SiO2 deposition. Applying the mechanical vibration of the cantilever, the light intensity of photoluminescence of NV color centers (NVC) in the individual ND have been monitored under a magnet field. Indicating a specific orientation, one peak is sensitive to the vibration stress showing the frequency shifts under the influence of static magnetic field (3.4 mT) at 2.86 GHz. It is realized that NV color centers need to be at one orientation to clearly observe the stress effect on ESR spectrum, which can be done by detection in the crystal of NDs. This technique indicates the next possibility for measuring a vector stress optomechanically using such embedded NDs by SiO2 film.",
keywords = "ESR, Nano-diamond, Nitrogen vacancy color center, Stress sensing",
author = "Masaya Toda and Shahrukh, {Akhtar M.} and Takahito Ono",
note = "Funding Information: In this work, the prospect of using NV centers in nano-diamond (ND) particle as a sensor detecting vector stress is studied. The Si micro-cantilevers with SiO2 embedded ND particles containing nitrogen vacancy centers (NVC) have been successfully fabricated. By the SEM analysis, ultrasonic electrophoretic deposition was found out to be a suitable method to get homogenous distribution of NDs on SOI wafer. It is found that TEOS-CVD of SiO2 does not harm the NVC as it is a chemical deposition process, instead of SiO2 sputtering. The cycle of compressive and tensile stresses are generated on the NDs containing NV centers by resonating the cantilevers containing NV centers embedded under SiO2 thin film. From the ODMR experiment for NVC, due to the external magnetic field of 3.4 mT, the peaks were split into 6 peaks suggesting that NV centers are present in three orientations. The one oriented ESR peak showed a significant change due to external stress and magnetic field. When the NV center orientation and external magnetic field is aligned, the stress vector detection is possible. The vector stress sensing is useful for scanning probe of 3D magnetic imaging, like magnetic resonance force microscopy (MRFM). This work may hopefully contribute to the better understanding of the NV center photoluminescence properties and ESR and their applications in magnetic and stress vector sensing. Acknowledgement Parts of this work were performed in the Micro/Nanomachining Research Education Center (MNC) and Micro System Integration Center (µSIC) of Tohoku University. We acknowledge partial financial support from th Promotion of Joint International Research by the JSPS KAKENHI Grant Numbers 19H02568. Funding Information: Parts of this work were performed in the Micro/Nanomachining Research Education Center (MNC) and Micro System Integration Center (?SIC) of Tohoku University. We acknowledge partial financial support from th Promotion of Joint International Research by the JSPS KAKENHI Grant Numbers 19H02568. Publisher Copyright: {\textcopyright} 2020 The Institute of Electrical Engineers of Japan.",
year = "2020",
month = sep,
day = "1",
doi = "10.1541/ieejsmas.140.222",
language = "English",
volume = "140",
pages = "222--227",
journal = "IEEJ Transactions on Sensors and Micromachines",
issn = "1341-8939",
publisher = "The Institute of Electrical Engineers of Japan",
number = "9",
}