Vacancy color stress sensing with embedded diamond particles on Si micro-cantilevers

Masaya Toda, Akhtar M. Shahrukh, Takahito Ono

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Monitoring a peak shift in the photoluminescence (PL) spectrum of nitrogen vacancy (NV) with the embedded nano-diamonds (NDs) indicates the stress change on the Si micro-cantilever resonator. There is a clear peak splitting under static magnet field, and showing the peak shift by applied periodic compressive and tensile stresses. The NDs have been simply embedded on the Si micro-cantilever by SiO2 deposition. Applying the mechanical vibration of the cantilever, the light intensity of photoluminescence of NV color centers (NVC) in the individual ND have been monitored under a magnet field. Indicating a specific orientation, one peak is sensitive to the vibration stress showing the frequency shifts under the influence of static magnetic field (3.4 mT) at 2.86 GHz. It is realized that NV color centers need to be at one orientation to clearly observe the stress effect on ESR spectrum, which can be done by detection in the crystal of NDs. This technique indicates the next possibility for measuring a vector stress optomechanically using such embedded NDs by SiO2 film.

Original languageEnglish
Pages (from-to)222-227
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Issue number9
Publication statusPublished - 2020 Sept 1


  • ESR
  • Nano-diamond
  • Nitrogen vacancy color center
  • Stress sensing


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