TY - GEN
T1 - Vacuum operation characteristics of two-dimensional micro-mirror
AU - Chu, Hoang Manh
AU - Hane, Kazuhiro
PY - 2010
Y1 - 2010
N2 - We present design, fabrication and characteristics of two-dimensional micro-machined scanner. The resonant frequencies of horizontal and vertical axes are 40 kHz and 162 Hz for the inner mirror and gimbal frame, respectively. The optical scanning angles are obtained to be 11.5 and 14 degrees at the low driving voltages of 12 and 10 V in 1 Pa vacuum for the horizontal inner mirror and vertical gimbal frame, respectively. The scanner can be actuated simultaneously and independently in the two orthogonal axes using a slanted electrostatic comb-drive and silicon conductive V-shaped torsion hinges. The dependence of quality factor on pressure for the inner mirror and gimbal frame was also experimentally investigated and compared with the theoretical calculation based on air-friction models.
AB - We present design, fabrication and characteristics of two-dimensional micro-machined scanner. The resonant frequencies of horizontal and vertical axes are 40 kHz and 162 Hz for the inner mirror and gimbal frame, respectively. The optical scanning angles are obtained to be 11.5 and 14 degrees at the low driving voltages of 12 and 10 V in 1 Pa vacuum for the horizontal inner mirror and vertical gimbal frame, respectively. The scanner can be actuated simultaneously and independently in the two orthogonal axes using a slanted electrostatic comb-drive and silicon conductive V-shaped torsion hinges. The dependence of quality factor on pressure for the inner mirror and gimbal frame was also experimentally investigated and compared with the theoretical calculation based on air-friction models.
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U2 - 10.1109/OMEMS.2010.5672159
DO - 10.1109/OMEMS.2010.5672159
M3 - Conference contribution
AN - SCOPUS:78751493149
SN - 9781424489251
T3 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
SP - 113
EP - 114
BT - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
T2 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Y2 - 9 August 2010 through 12 August 2010
ER -