TY - GEN
T1 - Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection
AU - Xue, Gaopeng
AU - Toda, Masaya
AU - Ono, Takahito
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - The vacuum packaged cantilever with a small magnet is fabricated successfully, and applied to map the magnetic field and radical density at the ambient atmosphere based on magnetic force sensing. The 1.5-μm-thick Si cantilever with a 20-μm-diameter of Nd-Fe-B particle is packaged in a vacuum cavity using an anodic-bonding technique. Before the final bonding process, the relationship of the quality (Q) factor of cantilever with pressure is calibrated. After vacuum packaging, the pressure is determined to be in the range of 7.3×102 ∼ 1.0×103 Pa. The force sensitivity is estimated to be 1.1×10-13 N/√Hz. The magnetic fields with a resolution of ∼4.0×10-6 and ∼2.4×10-10 T are detected by measuring the variations of the resonant frequency and resonant amplitude of the cantilever, respectively. Also, the magnetic force caused by electron spin resonance (ESR) of a standard radical polymer, DPPH, is demonstrated at atmospheric environment.
AB - The vacuum packaged cantilever with a small magnet is fabricated successfully, and applied to map the magnetic field and radical density at the ambient atmosphere based on magnetic force sensing. The 1.5-μm-thick Si cantilever with a 20-μm-diameter of Nd-Fe-B particle is packaged in a vacuum cavity using an anodic-bonding technique. Before the final bonding process, the relationship of the quality (Q) factor of cantilever with pressure is calibrated. After vacuum packaging, the pressure is determined to be in the range of 7.3×102 ∼ 1.0×103 Pa. The force sensitivity is estimated to be 1.1×10-13 N/√Hz. The magnetic fields with a resolution of ∼4.0×10-6 and ∼2.4×10-10 T are detected by measuring the variations of the resonant frequency and resonant amplitude of the cantilever, respectively. Also, the magnetic force caused by electron spin resonance (ESR) of a standard radical polymer, DPPH, is demonstrated at atmospheric environment.
KW - Anodic bonding
KW - Cantilever
KW - Magnetic sensor
KW - Vacuum packaging
UR - http://www.scopus.com/inward/record.url?scp=85029351724&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85029351724&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2017.7994243
DO - 10.1109/TRANSDUCERS.2017.7994243
M3 - Conference contribution
AN - SCOPUS:85029351724
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 1096
EP - 1099
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -