Vapor-liquid-solid tri-phase pulsed-laser epitaxy of RBa2Cu 3O7-y single-crystal films

K. S. Yun, B. D. Choi, Y. Matsumoto, J. H. Song, N. Kanda, T. Itoh, M. Kawasaki, T. Chikyow, P. Ahmet, H. Koinuma

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59 Citations (Scopus)


We report on the fabrication of single-crystalline thin films of RBa 2Cu3O7-y (R: rare-earth element, R123) using an approach of vapor-liquid-solid tri-phase epitaxy. This method is based on application of pulsed-laser deposition under appropriate compositions and conditions predetermined from the relevant thermodynamic phase diagram. The laser-ablated gases of R, Ba, and Cu, and their oxides dissolve into a liquid Ba3Cu5Ox(3BaCuO2+2CuO) layer placed on the film/substrate surface, penetrate to reach the liquid-solid interface with a seed R123, and are condensed into the solid R123 phase under a quasiequilibrium state. The uniform single-crystalline nature of the film was verified by x-ray diffraction, atomic-force microscopy, and transmission electron microscopy by the observation of giant grain size and atomic-scale surface smoothness.

Original languageEnglish
Pages (from-to)61-63
Number of pages3
JournalApplied Physics Letters
Issue number1
Publication statusPublished - 2002 Jan 7
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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