Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism

Syotaro Abe, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)


Design and fabrication of a variable-gap waveguide coupler switch with a nano latch mechanism are reported for on-chip waveguide circuits in Si photonics. The proposed switch consists of a coupler of two freestanding 400-nm-wide 260-nm-thick Si waveguides, three 30-μm-wide 40-μm-long comb-drive actuators, and a nanolatch mechanism. The nanolatch mechanism consists of four hook-shaped latches for maintaining a switch-on state at a coupler gap of around 100 nm. The switching and latching characteristics are investigated. The port isolation under the latch-on condition is found to be 17 dB. Due to the capacitive operation of the actuators and the nanolatch mechanism, power consumption of the switch is minimized.

Original languageEnglish
Article number6472777
Pages (from-to)675-677
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number7
Publication statusPublished - 2013 Apr 1


  • Microelectromechanical systems
  • Si photonics
  • Waveguide coupler
  • Waveguide switch


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