Variation analysis of TiN FinFETs

K. Endo; T. Matsukawa; Y. Ishikawa; Y. X. Liu; S. O'uchi; K. Sakamoto; J. Tsukada; H. Yamauchi; M. Masahara

doi:10.1109/ISDRS.2009.5378198

Variation analysis of TiN FinFETs

K. Endo, T. Matsukawa, Y. Ishikawa, Y. X. Liu, S. O'uchi, K. Sakamoto, J. Tsukada, H. Yamauchi, M. Masahara

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2009 International Semiconductor Device Research Symposium, ISDRS '09
DOIs	https://doi.org/10.1109/ISDRS.2009.5378198
Publication status	Published - 2009 Dec 1
Externally published	Yes
Event	2009 International Semiconductor Device Research Symposium, ISDRS '09 - College Park, MD, United States Duration: 2009 Dec 9 → 2009 Dec 11

Publication series

Name	2009 International Semiconductor Device Research Symposium, ISDRS '09

Other

Other	2009 International Semiconductor Device Research Symposium, ISDRS '09
Country/Territory	United States
City	College Park, MD
Period	09/12/9 → 09/12/11

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/ISDRS.2009.5378198

Cite this

Endo, K, Matsukawa, T, Ishikawa, Y, Liu, YX, O'uchi, S, Sakamoto, K, Tsukada, J, Yamauchi, H & Masahara, M 2009, Variation analysis of TiN FinFETs. in 2009 International Semiconductor Device Research Symposium, ISDRS '09., 5378198, 2009 International Semiconductor Device Research Symposium, ISDRS '09, 2009 International Semiconductor Device Research Symposium, ISDRS '09, College Park, MD, United States, 09/12/9. https://doi.org/10.1109/ISDRS.2009.5378198

@inproceedings{cd74ad502f1f43799af5c21cf46ba147,

title = "Variation analysis of TiN FinFETs",

author = "K. Endo and T. Matsukawa and Y. Ishikawa and Liu, {Y. X.} and S. O'uchi and K. Sakamoto and J. Tsukada and H. Yamauchi and M. Masahara",

year = "2009",

month = dec,

day = "1",

doi = "10.1109/ISDRS.2009.5378198",

language = "English",

isbn = "9781424460304",

series = "2009 International Semiconductor Device Research Symposium, ISDRS '09",

booktitle = "2009 International Semiconductor Device Research Symposium, ISDRS '09",

note = "2009 International Semiconductor Device Research Symposium, ISDRS '09 ; Conference date: 09-12-2009 Through 11-12-2009",

}

TY - GEN

T1 - Variation analysis of TiN FinFETs

AU - Endo, K.

AU - Matsukawa, T.

AU - Ishikawa, Y.

AU - Liu, Y. X.

AU - O'uchi, S.

AU - Sakamoto, K.

AU - Tsukada, J.

AU - Yamauchi, H.

AU - Masahara, M.

PY - 2009/12/1

Y1 - 2009/12/1

UR - http://www.scopus.com/inward/record.url?scp=77949404653&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77949404653&partnerID=8YFLogxK

U2 - 10.1109/ISDRS.2009.5378198

DO - 10.1109/ISDRS.2009.5378198

M3 - Conference contribution

AN - SCOPUS:77949404653

SN - 9781424460304

T3 - 2009 International Semiconductor Device Research Symposium, ISDRS '09

BT - 2009 International Semiconductor Device Research Symposium, ISDRS '09

T2 - 2009 International Semiconductor Device Research Symposium, ISDRS '09

Y2 - 9 December 2009 through 11 December 2009

ER -

Variation analysis of TiN FinFETs

Publication series

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this