Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer

Takashi Sasaki, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer'. Together they form a unique fingerprint.

Engineering

Medicine and Dentistry