VIA-5 Planar-Type GaAs Avalanche Photodetector Fabricated by Focused Ca Ion-Beam Implantation

Yoshiro Hirayama, Hidehiko Iguchi, Hiroshi Okamotmo

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1863
Number of pages	1
Journal	IEEE Transactions on Electron Devices
Volume	33
Issue number	11
DOIs	https://doi.org/10.1109/T-ED.1986.22825
Publication status	Published - 1986 Nov
Externally published	Yes

ASJC Scopus subject areas

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title = "VIA-5 Planar-Type GaAs Avalanche Photodetector Fabricated by Focused Ca Ion-Beam Implantation",

author = "Yoshiro Hirayama and Hidehiko Iguchi and Hiroshi Okamotmo",

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