Vibrational micro-energy harvesters utilizing Nb-doped Pb(Zr,Ti)O3 films on stainless steel substrates

L. Van Minh, T. Sano, T. Fujii, H. Kuwano

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


This work presents the micromachined energy harvesters using Nb-doped Pb(Zr,Ti)O3 (PNZT) films grown directly on the stainless steel substrates (SUS430). Piezoelectric materials on metallic substrates have been attracted to practical and robust energy harvesters. Nb-doped PZT films with (001)-preferred orientation grown on SUS substrates provided excellent properties for energy harvesting - high piezoelectric coefficient (e 31 = -10.6 C/m2) and low dielectric permittivity (ϵr = 373). The PNZT-based micro-energy harvester comprising a cantilever of 1.7 mm× 5 mm × 0.05 mm and a proof mass of 3 mm× 5 mm × 47 mm achieved the normalized power density (NPD) of 2.87 It is the highest performance among the published SUS-based energy harvesters, being closer to the best Si- based energy harvesters.

Original languageEnglish
Article number012003
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 2016 Dec 14
Event16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2016 - Paris, France
Duration: 2016 Dec 62016 Dec 9


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