TY - GEN
T1 - Wafer-to-wafer transfer process of barium strontium titanate metal-insulator-metal structures by laser pre-irradiation and gold-gold bonding for frequency tuning applications
AU - Samoto, T.
AU - Hirano, H.
AU - Somekawa, T.
AU - Hikichi, K.
AU - Fujita, M.
AU - Esashi, M.
AU - Tanaka, S.
PY - 2013
Y1 - 2013
N2 - This is the first report on successful direct transfer of barium strontium titanate (BST) grown on a sapphire substrate at high temperature (∼650 °C) to a target substrate at low temperature. The key point of the transfer process is the pre-irradiation of frequency-tripled Nd:YVO4 laser to a laser adsorption layer beneath the BST layer through the transparent substrate, which weakens BST/Pt adhesion by thermal effect. The bonded substrates separated at BST/Pt interface near sapphire by slight impact to sapphire. After forming an upper Pt electrode on the transferred BST, voltage tuning of the dielectric constant was confirmed.
AB - This is the first report on successful direct transfer of barium strontium titanate (BST) grown on a sapphire substrate at high temperature (∼650 °C) to a target substrate at low temperature. The key point of the transfer process is the pre-irradiation of frequency-tripled Nd:YVO4 laser to a laser adsorption layer beneath the BST layer through the transparent substrate, which weakens BST/Pt adhesion by thermal effect. The bonded substrates separated at BST/Pt interface near sapphire by slight impact to sapphire. After forming an upper Pt electrode on the transferred BST, voltage tuning of the dielectric constant was confirmed.
KW - Barium strontium titanate
KW - Laser assisted transfer process
KW - Metal-insulator-metal variable capacitor
KW - Wafer-to-wafer bonding
UR - http://www.scopus.com/inward/record.url?scp=84891717241&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891717241&partnerID=8YFLogxK
U2 - 10.1109/Transducers.2013.6626729
DO - 10.1109/Transducers.2013.6626729
M3 - Conference contribution
AN - SCOPUS:84891717241
SN - 9781467359818
T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
SP - 171
EP - 174
BT - 2013 Transducers and Eurosensors XXVII
T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Y2 - 16 June 2013 through 20 June 2013
ER -