Wavelet analysis for precision measurement of a micro-part

Toshiki Takeishi; Xu Bin; Yuki Shimizu; Wei Gao

Wavelet analysis for precision measurement of a micro-part

Toshiki Takeishi, Xu Bin, Yuki Shimizu, Wei Gao

ENG - Finemechanics

Tohoku University

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper presents precision measurement of a micro-part which has micro-structured surfaces. Micro-parts sometimes have short pitches and large amplitudes. Measurements are conducted by the use of conventional measuring instruments and found that these instruments are difficult to measure their profiles. A novel measuring system is presented which uses a contact-type displacement sensor, probe shaft of which is levitated by air-bearings to reduce the contact force. After developing the new measuring system, measurement and analysis results are shown. Wavelet analysis reveals that there are errors in the measurement results and they are caused by stylus jump.

Original language	English
Publication status	Published - 2011
Event	6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan Duration: 2011 Nov 8 → 2011 Nov 10

Conference

Conference	6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
Country/Territory	Japan
City	Omiya Sonic City, Saitama
Period	11/11/8 → 11/11/10

Keywords

Displacement sensor
Measurement
Surface profiler
Wavelet analysis

Cite this

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title = "Wavelet analysis for precision measurement of a micro-part",

abstract = "This paper presents precision measurement of a micro-part which has micro-structured surfaces. Micro-parts sometimes have short pitches and large amplitudes. Measurements are conducted by the use of conventional measuring instruments and found that these instruments are difficult to measure their profiles. A novel measuring system is presented which uses a contact-type displacement sensor, probe shaft of which is levitated by air-bearings to reduce the contact force. After developing the new measuring system, measurement and analysis results are shown. Wavelet analysis reveals that there are errors in the measurement results and they are caused by stylus jump.",

keywords = "Displacement sensor, Measurement, Surface profiler, Wavelet analysis",

author = "Toshiki Takeishi and Xu Bin and Yuki Shimizu and Wei Gao",

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T1 - Wavelet analysis for precision measurement of a micro-part

AU - Takeishi, Toshiki

AU - Bin, Xu

AU - Shimizu, Yuki

AU - Gao, Wei

PY - 2011

Y1 - 2011

N2 - This paper presents precision measurement of a micro-part which has micro-structured surfaces. Micro-parts sometimes have short pitches and large amplitudes. Measurements are conducted by the use of conventional measuring instruments and found that these instruments are difficult to measure their profiles. A novel measuring system is presented which uses a contact-type displacement sensor, probe shaft of which is levitated by air-bearings to reduce the contact force. After developing the new measuring system, measurement and analysis results are shown. Wavelet analysis reveals that there are errors in the measurement results and they are caused by stylus jump.

AB - This paper presents precision measurement of a micro-part which has micro-structured surfaces. Micro-parts sometimes have short pitches and large amplitudes. Measurements are conducted by the use of conventional measuring instruments and found that these instruments are difficult to measure their profiles. A novel measuring system is presented which uses a contact-type displacement sensor, probe shaft of which is levitated by air-bearings to reduce the contact force. After developing the new measuring system, measurement and analysis results are shown. Wavelet analysis reveals that there are errors in the measurement results and they are caused by stylus jump.

KW - Displacement sensor

KW - Measurement

KW - Surface profiler

KW - Wavelet analysis

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M3 - Paper

AN - SCOPUS:84883350010

T2 - 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011

Y2 - 8 November 2011 through 10 November 2011

ER -

Wavelet analysis for precision measurement of a micro-part

Abstract

Conference

Keywords

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