Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates

S. Komiyama; Y. Sutou; K. Oikawa; J. Koike; M. Wang; M. Sakurai

doi:10.1016/j.triboint.2015.02.005

Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates

S. Komiyama, Y. Sutou, K. Oikawa, J. Koike, M. Wang, M. Sakurai

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

The wear properties of δ-(Ti,Mo)N films deposited at low and high nitrogen gas flow rates (f_N2) were investigated. The film at f_N2=2.0 sccm showed better adhesive wear resistance than that at f_N2=0.3 sccm. Such improvement in the film at f_N2=2.0 sccm was due to the formation of Mo oxide debris by wear oxidation. It was found that Mo oxidation more easily occurred in the film at f_N2=2.0 sccm than in the film at f_N2=0.3 sccm. Thermodynamic consideration indicated that since the activity of Ti in δ-(Ti,Mo)N decreases with increasing N content, Mo oxidation is promoted in the film at f_N2=2.0 sccm, which leads to better wear properties.

Original language	English
Pages (from-to)	32-39
Number of pages	8
Journal	Tribology International
Volume	87
DOIs	https://doi.org/10.1016/j.triboint.2015.02.005
Publication status	Published - 2015 Jul

Keywords

Coating
Debris
Self-lubricating

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.triboint.2015.02.005

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title = "Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates",

abstract = "The wear properties of δ-(Ti,Mo)N films deposited at low and high nitrogen gas flow rates (fN2) were investigated. The film at fN2=2.0 sccm showed better adhesive wear resistance than that at fN2=0.3 sccm. Such improvement in the film at fN2=2.0 sccm was due to the formation of Mo oxide debris by wear oxidation. It was found that Mo oxidation more easily occurred in the film at fN2=2.0 sccm than in the film at fN2=0.3 sccm. Thermodynamic consideration indicated that since the activity of Ti in δ-(Ti,Mo)N decreases with increasing N content, Mo oxidation is promoted in the film at fN2=2.0 sccm, which leads to better wear properties.",

keywords = "Coating, Debris, Self-lubricating",

author = "S. Komiyama and Y. Sutou and K. Oikawa and J. Koike and M. Wang and M. Sakurai",

note = "Funding Information: This study was supported by the Industrial Technology Research Grant Program of the New Energy and Industrial Technology Development Organization (NEDO) of Japan in 2011. This work was partially supported by the Osawa Scientific Studies Grants Foundation . Publisher Copyright: {\textcopyright} 2015 Elsevier Ltd. All rights reserved.",

year = "2015",

month = jul,

doi = "10.1016/j.triboint.2015.02.005",

language = "English",

volume = "87",

pages = "32--39",

journal = "Tribology International",

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T1 - Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates

AU - Komiyama, S.

AU - Sutou, Y.

AU - Oikawa, K.

AU - Koike, J.

AU - Wang, M.

AU - Sakurai, M.

N1 - Funding Information: This study was supported by the Industrial Technology Research Grant Program of the New Energy and Industrial Technology Development Organization (NEDO) of Japan in 2011. This work was partially supported by the Osawa Scientific Studies Grants Foundation . Publisher Copyright: © 2015 Elsevier Ltd. All rights reserved.

PY - 2015/7

Y1 - 2015/7

N2 - The wear properties of δ-(Ti,Mo)N films deposited at low and high nitrogen gas flow rates (fN2) were investigated. The film at fN2=2.0 sccm showed better adhesive wear resistance than that at fN2=0.3 sccm. Such improvement in the film at fN2=2.0 sccm was due to the formation of Mo oxide debris by wear oxidation. It was found that Mo oxidation more easily occurred in the film at fN2=2.0 sccm than in the film at fN2=0.3 sccm. Thermodynamic consideration indicated that since the activity of Ti in δ-(Ti,Mo)N decreases with increasing N content, Mo oxidation is promoted in the film at fN2=2.0 sccm, which leads to better wear properties.

AB - The wear properties of δ-(Ti,Mo)N films deposited at low and high nitrogen gas flow rates (fN2) were investigated. The film at fN2=2.0 sccm showed better adhesive wear resistance than that at fN2=0.3 sccm. Such improvement in the film at fN2=2.0 sccm was due to the formation of Mo oxide debris by wear oxidation. It was found that Mo oxidation more easily occurred in the film at fN2=2.0 sccm than in the film at fN2=0.3 sccm. Thermodynamic consideration indicated that since the activity of Ti in δ-(Ti,Mo)N decreases with increasing N content, Mo oxidation is promoted in the film at fN2=2.0 sccm, which leads to better wear properties.

KW - Coating

KW - Debris

KW - Self-lubricating

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DO - 10.1016/j.triboint.2015.02.005

M3 - Article

AN - SCOPUS:84923779341

SN - 0301-679X

VL - 87

SP - 32

EP - 39

JO - Tribology International

JF - Tribology International

ER -

Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates

Abstract

Keywords

ASJC Scopus subject areas

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