TY - GEN
T1 - Wideband tunable love wave filter using electrostatically-actuated MEMS variable capacitors integrated on lithium niobate
AU - Yasue, T.
AU - Komatsu, T.
AU - Nakamura, N.
AU - Hashimoto, K.
AU - Hirano, Hideki
AU - Esashi, Masayoshi
AU - Tanaka, S.
N1 - Funding Information:
This research was supported by the Japan Society for the Promotion of Science (JSPS) through its “Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program).”
PY - 2011
Y1 - 2011
N2 - A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. We have demonstrated a wideband tunable filter with the center frequency of 1.08 GHz by directly integrating Love wave resonators and electrostatically-actuated MEMS variable capacitors on a 15°Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2 ∼ 30 %), providing wide bandwidth and wide tuning range. We confirmed that the 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.
AB - A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. We have demonstrated a wideband tunable filter with the center frequency of 1.08 GHz by directly integrating Love wave resonators and electrostatically-actuated MEMS variable capacitors on a 15°Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2 ∼ 30 %), providing wide bandwidth and wide tuning range. We confirmed that the 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.
KW - Love wave
KW - SAW filter
KW - Tunable filter
KW - Variable capacitor
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U2 - 10.1109/TRANSDUCERS.2011.5969676
DO - 10.1109/TRANSDUCERS.2011.5969676
M3 - Conference contribution
AN - SCOPUS:80052135872
SN - 9781457701573
T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
SP - 1488
EP - 1491
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Y2 - 5 June 2011 through 9 June 2011
ER -