Wireless magnetic micromachine of planar structure with magnetic thin film

Aya Yamazaki, Masahiko Sendoh, Kazushi Ishiyama, Ken Ichi Arai

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Magnetic micromachines are driven by a magnetic field. They require no power supply cables, no batteries, and no controlling systems on the body of the machine. The magnetic micromachine of planar structure was fabricated with magnetic thin film. The size of this micromachine is 30 × 60 × 12 μm. The micromachine swam at the rotational frequency of 1-10 Hz in the water with a kinematic viscosity of 1 mm2 /s and a Reynolds number of 0.1-1. The magnetic torque required for rotating the micromachine was very small, and it was clarified that the value could be realized with a magnetic thin film.

Original languageEnglish
Pages (from-to)4021-4023
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number10
Publication statusPublished - 2005 Oct


  • Magnetic field
  • Magnetic thin film
  • Micromachine
  • Planar structure
  • Propeller shape
  • Reynolds number


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