TY - JOUR
T1 - X-ray computed tomography studies on directed self-assembly formed vertical nanocylinders containing metals for 3D LSI applications - Characterization technique-dependent reliability issues
AU - Murugesan, M.
AU - Takeuchi, A.
AU - Fukushima, T.
AU - Koyanagi, M.
N1 - Publisher Copyright:
© 2019 The Japan Society of Applied Physics.
PY - 2019
Y1 - 2019
N2 - We report the experimental results of X-ray computed tomography (X-CT) of directed self-assembly (DSA) formed metal-containing nanocylinders with a width in the range of 25-30 nm. We compare the X-CT results for DSA formed metal nanowires inside deep Si trenches with those of conventional morphological characterization techniques such as scanning electron microscopy (SEM) and transmission electron microscopy (TEM). It is found that X-CT is more reliable than SEM and TEM, especially when analyzing the 3D nanometer-sized structures embedded in the organic matrix.
AB - We report the experimental results of X-ray computed tomography (X-CT) of directed self-assembly (DSA) formed metal-containing nanocylinders with a width in the range of 25-30 nm. We compare the X-CT results for DSA formed metal nanowires inside deep Si trenches with those of conventional morphological characterization techniques such as scanning electron microscopy (SEM) and transmission electron microscopy (TEM). It is found that X-CT is more reliable than SEM and TEM, especially when analyzing the 3D nanometer-sized structures embedded in the organic matrix.
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U2 - 10.7567/1347-4065/ab02e2
DO - 10.7567/1347-4065/ab02e2
M3 - Article
AN - SCOPUS:85065637590
SN - 0021-4922
VL - 58
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 59
M1 - SBBC05
ER -