X-ray reflectivity from ZnSe/GaAs heterostructures

A. Ulyanenkov, A. Takase, M. Kuribayashi, K. Ishida, A. Ohtake, K. Arai, T. Kanada, T. Yasuda, T. Yao, H. Tomita, S. Komiya

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11 Citations (Scopus)


ZnSe/GaAs heterostructures have been studied using x-ray reflectivity. Two samples grown by molecular beam epitaxy (MBE) differed in initial growing conditions; the first was prepared by Se treatment of a GaAs substrate, and the second one was exposed to Zn before growth of the ZnSe film. The structure and morphology of the interface between the ZnSe film and GaAs substrate were investigated. The experimental x-ray reflectivity curves, measured at different wavelengths, were simulated using a distorted-wave Born approximation method. Fitting the experimental data indicated the presence of a Ga2Se3 transition layer between the ZnSe film and GaAs substrate for the Se-treated sample, confirming that Zn treatment during the MBE growing process improves the interface quality. Furthermore, the simulations indicated that the concentration of the Ga2Se3 was less than unity. From this, we propose that the transition layer is discontinuous, e.g., possesses an island-like morphology.

Original languageEnglish
Pages (from-to)1520-1523
Number of pages4
JournalJournal of Applied Physics
Issue number3
Publication statusPublished - 1999 Feb
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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