XPS and TEM study of W-DLC/DLC double-layered film

Takanori Takeno; Takao Komiyama; Hiroyuki Miki; Toshiyuki Takagi; Takashi Aoyama

doi:10.1016/j.tsf.2009.03.033

XPS and TEM study of W-DLC/DLC double-layered film

Takanori Takeno, Takao Komiyama, Hiroyuki Miki, Toshiyuki Takagi, Takashi Aoyama

Research output: Contribution to journal › Article › peer-review

33 Citations (Scopus)

Abstract

A double-layered film of tungsten-containing diamond-like carbon (W-DLC) and DLC, (W-DLC)/DLC, was investigated. A film of 1.6 μm in thickness was deposited onto silicon substrate. The investigate double-layered coating was deposited by using the combination of PECVD and co-sputtering of tungsten metal target. Structure, interface and chemical bonding state of the investigated film were analyzed by Transmission electron microscope (TEM) and X-ray photoelectron spectroscopy (XPS). From the results of the analyses, the structure of double-layered film is that amorphous phase of carbon is continued from DLC to W-DLC and tungsten metal clusters are dispersed in W-DLC layer.

Original language	English
Pages (from-to)	5010-5013
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	17
DOIs	https://doi.org/10.1016/j.tsf.2009.03.033
Publication status	Published - 2009 Jul 1

Keywords

DLC
Double layer
Transmission electron microscope
Tungsten
X-ray photoelectron spectroscopy

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10.1016/j.tsf.2009.03.033

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title = "XPS and TEM study of W-DLC/DLC double-layered film",

abstract = "A double-layered film of tungsten-containing diamond-like carbon (W-DLC) and DLC, (W-DLC)/DLC, was investigated. A film of 1.6 μm in thickness was deposited onto silicon substrate. The investigate double-layered coating was deposited by using the combination of PECVD and co-sputtering of tungsten metal target. Structure, interface and chemical bonding state of the investigated film were analyzed by Transmission electron microscope (TEM) and X-ray photoelectron spectroscopy (XPS). From the results of the analyses, the structure of double-layered film is that amorphous phase of carbon is continued from DLC to W-DLC and tungsten metal clusters are dispersed in W-DLC layer.",

keywords = "DLC, Double layer, Transmission electron microscope, Tungsten, X-ray photoelectron spectroscopy",

author = "Takanori Takeno and Takao Komiyama and Hiroyuki Miki and Toshiyuki Takagi and Takashi Aoyama",

note = "Funding Information: This work was supported by Grant-in-Aid for Young Scientists (B) (No.20760095) of Japan Society for the Promotion of Science(JSPS). Authors are greatly thankful to Mr. Takeshi Sato in Institute of Fluid Science in Tohoku University for his technical assistance.",

year = "2009",

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doi = "10.1016/j.tsf.2009.03.033",

language = "English",

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pages = "5010--5013",

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T1 - XPS and TEM study of W-DLC/DLC double-layered film

AU - Takeno, Takanori

AU - Komiyama, Takao

AU - Miki, Hiroyuki

AU - Takagi, Toshiyuki

AU - Aoyama, Takashi

N1 - Funding Information: This work was supported by Grant-in-Aid for Young Scientists (B) (No.20760095) of Japan Society for the Promotion of Science(JSPS). Authors are greatly thankful to Mr. Takeshi Sato in Institute of Fluid Science in Tohoku University for his technical assistance.

PY - 2009/7/1

Y1 - 2009/7/1

N2 - A double-layered film of tungsten-containing diamond-like carbon (W-DLC) and DLC, (W-DLC)/DLC, was investigated. A film of 1.6 μm in thickness was deposited onto silicon substrate. The investigate double-layered coating was deposited by using the combination of PECVD and co-sputtering of tungsten metal target. Structure, interface and chemical bonding state of the investigated film were analyzed by Transmission electron microscope (TEM) and X-ray photoelectron spectroscopy (XPS). From the results of the analyses, the structure of double-layered film is that amorphous phase of carbon is continued from DLC to W-DLC and tungsten metal clusters are dispersed in W-DLC layer.

AB - A double-layered film of tungsten-containing diamond-like carbon (W-DLC) and DLC, (W-DLC)/DLC, was investigated. A film of 1.6 μm in thickness was deposited onto silicon substrate. The investigate double-layered coating was deposited by using the combination of PECVD and co-sputtering of tungsten metal target. Structure, interface and chemical bonding state of the investigated film were analyzed by Transmission electron microscope (TEM) and X-ray photoelectron spectroscopy (XPS). From the results of the analyses, the structure of double-layered film is that amorphous phase of carbon is continued from DLC to W-DLC and tungsten metal clusters are dispersed in W-DLC layer.

KW - DLC

KW - Double layer

KW - Transmission electron microscope

KW - Tungsten

KW - X-ray photoelectron spectroscopy

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DO - 10.1016/j.tsf.2009.03.033

M3 - Article

AN - SCOPUS:65649088282

SN - 0040-6090

VL - 517

SP - 5010

EP - 5013

JO - Thin Solid Films

JF - Thin Solid Films

IS - 17

ER -

XPS and TEM study of W-DLC/DLC double-layered film

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Keywords

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