XPS and TEM study of W-DLC/DLC double-layered film

Takanori Takeno, Takao Komiyama, Hiroyuki Miki, Toshiyuki Takagi, Takashi Aoyama

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33 Citations (Scopus)


A double-layered film of tungsten-containing diamond-like carbon (W-DLC) and DLC, (W-DLC)/DLC, was investigated. A film of 1.6 μm in thickness was deposited onto silicon substrate. The investigate double-layered coating was deposited by using the combination of PECVD and co-sputtering of tungsten metal target. Structure, interface and chemical bonding state of the investigated film were analyzed by Transmission electron microscope (TEM) and X-ray photoelectron spectroscopy (XPS). From the results of the analyses, the structure of double-layered film is that amorphous phase of carbon is continued from DLC to W-DLC and tungsten metal clusters are dispersed in W-DLC layer.

Original languageEnglish
Pages (from-to)5010-5013
Number of pages4
JournalThin Solid Films
Issue number17
Publication statusPublished - 2009 Jul 1


  • DLC
  • Double layer
  • Transmission electron microscope
  • Tungsten
  • X-ray photoelectron spectroscopy


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