@inproceedings{fcbee367e56048169956f3009ab886f9,
title = "XY-stage for scanning media for optical data storage",
abstract = "XY-stage driven by the electrostatic comb-drive actuator is fabricated realizing long displacement. The actuator is fabricated in one layer of silicon-on-insulator (SOI) wafer, and the media plate is in the other layer. The raster scanning of the plate is realized maintaining orthogonal xy-directions. The fast scanning is y-axis. Two 820×950μm2-size media plates are driven at the opposite y directions canceling the inertia force. The static maximum displacements are 110μm (geometrical limit) along x-axis and 90μm along y-axis. At the resonance, 115μm (geometrical limit) is obtained along y-axis.",
keywords = "Electrostatic actuator, Long displacement, Media plate, XY-stage",
author = "Minoru Sasaki and Fuminori Bono and Kazuhiro Hane",
year = "2006",
doi = "10.1109/omems.2006.1708252",
language = "English",
isbn = "078039562X",
series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
publisher = "IEEE Computer Society",
pages = "36--37",
booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
address = "United States",
note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",
}