@article{d191117fbd6d4a3aaae6d31bb63f21ee,
title = "Young's modulus of plasma-polymerized allylamine films using micromechanical cantilever sensor and laser-based surface acoustic wave techniques",
abstract = "Mechanical properties of ultra-thin organic films are fundamentally important in coating applications. Micromechanical cantilever sensor (MCS) and laser-based surface acoustic wave (LA-SAW) techniques were both used to measure Young's moduli (E) of plasma polymerized films at different humidities (H). For plasma polymerized allylamine (ppAA) films deposited at 5 W and 90 W, E of 1400 ± 350 MPa and 110 ± 20 MPa at H between 10 and 40%, and 1070 ± 250 MPa and 32 ± 10 MPa at H between 70 and 80% were measured. The LA-SAW technique revealed E lower than 60% of that measured by MCS. The difference suggested either an enhanced swelling at the air interface or a gradient of cross-linking density.",
keywords = "Young's modulus of ultra-thin films, cantilever sensing, humidity sensor, plasma polymerization",
author = "Masaya Toda and Koji Miyake and Chu, {Li Qiang} and Marjan Zakerin and Renate F{\"o}rch and R{\"u}diger Berger and Itakura, {Akiko N.}",
note = "Funding Information: Dr. Kenji Sakurai from NIMS is acknowledged for providing the X-ray refractivity tool and help in determining the film density. We acknowledge the input of our former group member Dr. Shin-ichi Igarashi (now at Shin-Etsu Chemical Co., Ltd.), as we started this research with him and the basic idea came from our discussions. This research was supported by funding from the Japanese Science and Technology Agency, National Institute for Material Science, and the Max Planck Institute for Polymer Research, Germany. We acknowledge partial financial support from the Deutsche Forschungsgemeinschaft (DFG) within the Strategic Japanese German Cooperative Program on Nanoelectronics (BE3286/2-1) and (BE 3286/4-1). In addition, we acknowledge the funding received from the Promotion of Joint International Research by the JSPS KAKENHI Grant Numbers 15KK0225. Funding Information: the Japanese Science and Technology Agency; National Institute for Material Science; the Max Planck Institute for Polymer Research, Germany; Deutsche Forschungsgemeinschaft (DFG) within the Strategic Japanese German Cooperative Program on Nanoelectronics, Grant numbers: BE3286/2-1, BE 3286/4-1; JSPS KAKENHI, Grant number: 15KK0225 Funding Information: We would like to thank Mr. Andrey Grinevich, who was an internship student from Charles University, and Dr. Megumi Fukuta from the National Institute of Advanced Industrial Science and Technology for the measurements of LA-SAWs. Dr. Kenji Sakurai from NIMS is acknowledged for providing the X-ray refractivity tool and help in determining the film density. We acknowledge the input of our former group member Dr. Shin-ichi Igarashi (now at Shin-Etsu Chemical Co., Ltd.), as we started this research with him and the basic idea came from our discussions. This research was supported by funding from the Japanese Science and Technology Agency, National Institute for Material Science, and the Max Planck Institute for Polymer Research, Germany. We acknowledge partial financial support from the Deutsche Forschungsgemeinschaft (DFG) within the Strategic Japanese German Cooperative Program on Nanoelectronics (BE3286/2-1) and (BE 3286/4-1). In addition, we acknowledge the funding received from the Promotion of Joint International Research by the JSPS KAKENHI Grant Numbers 15KK0225. Publisher Copyright: {\textcopyright} 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim",
year = "2018",
month = sep,
doi = "10.1002/ppap.201800083",
language = "English",
volume = "15",
journal = "Plasma Processes and Polymers",
issn = "1612-8850",
publisher = "Wiley-VCH Verlag",
number = "9",
}