TY - JOUR
T1 - Yttria stabilized zirconia transparent films prepared by chemical vapor deposition
AU - Yamane, Hisanori
AU - Hirai, Toshio
N1 - Funding Information:
The authors wish to thank Dr. H. Kido of Science Department of Tohoku University for the transmittance measurement. This research was supported, in part, by Research Development Corporation of Japan and the Ministry of Education, Science and Culture under Contract No. 60430019.
PY - 1989/4
Y1 - 1989/4
N2 - Yttria stabilized zirconia (YSZ) transparent films were prepared on quartz glass substrates at the temperature of 1375 K under atmospheric pressure using ZrCl4, YCl3 and O2 gases as source materials. The growth rate of the film thickness was 1.5 to 2.0 μm/h. Cubic YSZ films were obtained at the value of x between 20 to 60, where x is defined by x(wt%) = YCl3×100/(YCl3+ZrCl4). The lattice parameter of the cubic YSZ increased from 5.14 to 5.19 Å with the increase of x. Transparent films were obtained at the interval where the x value was between 20 to 45. The (100) plane of YSZ is oriented parallel to the surface of the substrate. For transparent film obtained at x = 29 (1.5 μm in thickness) the optical transmittance was 50-70% in the wavelength range of 250-800 nm.
AB - Yttria stabilized zirconia (YSZ) transparent films were prepared on quartz glass substrates at the temperature of 1375 K under atmospheric pressure using ZrCl4, YCl3 and O2 gases as source materials. The growth rate of the film thickness was 1.5 to 2.0 μm/h. Cubic YSZ films were obtained at the value of x between 20 to 60, where x is defined by x(wt%) = YCl3×100/(YCl3+ZrCl4). The lattice parameter of the cubic YSZ increased from 5.14 to 5.19 Å with the increase of x. Transparent films were obtained at the interval where the x value was between 20 to 45. The (100) plane of YSZ is oriented parallel to the surface of the substrate. For transparent film obtained at x = 29 (1.5 μm in thickness) the optical transmittance was 50-70% in the wavelength range of 250-800 nm.
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U2 - 10.1016/0022-0248(89)90120-6
DO - 10.1016/0022-0248(89)90120-6
M3 - Article
AN - SCOPUS:0024641859
SN - 0022-0248
VL - 94
SP - 880
EP - 884
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 4
ER -