TY - GEN
T1 - λ/8 Precision parabolic resonant varifocal mirror
AU - Nakazawa, Kenta
AU - Sasaki, Takashi
AU - Hane, Kazuhiro
PY - 2014/10/14
Y1 - 2014/10/14
N2 - An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.
AB - An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.
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U2 - 10.1109/OMN.2014.6924613
DO - 10.1109/OMN.2014.6924613
M3 - Conference contribution
AN - SCOPUS:84908020955
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 101
EP - 102
BT - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PB - IEEE Computer Society
T2 - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Y2 - 17 August 2014 through 21 August 2014
ER -