周波数変調・積分型ジャイロスコープのための周波数・Q 値の自動マッチング手法の開発

This paper reports an automated tuning method for a frequency modulated / rate integrating gyroscope (FM/RIG). The frequency and quality factor mismatches in a MEMS resonator cause the mode-coupling, thus degrade the accuracy of the gyroscope. The X-Y phase difference and amplitude ratio of driving signals are used as the tuning parameters for the mismatch compensation. An automated tuning method based on the relationship between those tuning parameters and mode-coupling terms were developed. Using the proposed method, the mode-coupling effect, which comes from the freqnency and quality factor mismatch, could be 3 orders of magnitude smaller than the non-compensated one.