Gong, T.,
Suzuki, Y.,
Khan, M. J.,
Hiller, K. &
Tanaka, S.,
2023,
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc.,
p. 602-605 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2023-January).
研究成果: 書籍の章/レポート/Proceedings › 会議への寄与 › 査読