A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film

Chuan Hui Ou, Nguyen Van Toan, Yao Chuan Tsai, Ioana Voiculescu, Masaya Toda, Takahito Ono

研究成果: ジャーナルへの寄稿学術論文査読

抄録

An electromagnetic tip-tilt-piston micromirror with a large stroke is presented. This research introduced a novel actuation structure, based on a spring made from conductive metallic glass with excellent mechanical properties. For the first time, two functional elements, an electromagnetic actuation element and a mechanical support structure, were successfully integrated into a single-layer spring, made of metallic glass. With this novel actuator, the performance of stroke and angle controllability is remarkably improved. The fabricated device can achieve a 418 ~\mu \text{m} static stroke in upward direction. Furthermore, the tilting angles of the micromirror can be controlled with maximum accuracy of 0.05°/mA. The device is robust and has miniature dimensions, comparable or smaller, than existing electromagnetic micromirror dimensions published in literature. The displacement values of the micromirror are larger, compared to state-of-the-art electromagnetic micromirrors, which usually have strokes under 300 ~\mu \text{m} and do not have angle control mechanism. In spectrometer applications, the micromirror with a large stroke and controllable angle allows spectrometers to achieve higher resolution. These special qualities of the micromirror, will provide efficient, and reliable spatial light modulation required for interferometer applications.

本文言語英語
ページ(範囲)46-53
ページ数8
ジャーナルJournal of Microelectromechanical Systems
33
1
DOI
出版ステータス出版済み - 2024 2月 1

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