A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces

T. Motoki, W. Gao, S. Kiyono, T. Ono

研究成果: Article査読

28 被引用数 (Scopus)

抄録

This paper presents a nanoindentation instrument for 3D micro/nano-structured surfaces made of soft metals such as LSI circuit patterns. The instrument can carry out indentations with high resolution in both the vertical direction (Z) and lateral directions (XY). An electro-polished tungsten probe with a tip diameter of 100 nm is used as the indenter. The indentation motion along the Z-direction is generated by a PZT actuator. The sample is mounted on the free-end of a steel cantilever. The indentation depth and load can be accurately obtained from the PZT displacement, cantilever spring constant and the cantilever deflection measured by a capacitance-type displacement sensor. Nanoindentation experiments are carried out on an aluminium sample in the vacuum chamber of a scanning electronic microscope. Experimental results demonstrate that the instrument has the ability to perform nanoindentation.

本文言語English
ページ(範囲)495-499
ページ数5
ジャーナルMeasurement Science and Technology
17
3
DOI
出版ステータスPublished - 2006 3月 1

ASJC Scopus subject areas

  • 器械工学
  • 工学(その他)
  • 応用数学

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