This paper presents a nanoindentation instrument for 3D micro/nano-structured surfaces made of soft metals such as LSI circuit patterns. The instrument can carry out indentations with high resolution in both the vertical direction (Z) and lateral directions (XY). An electro-polished tungsten probe with a tip diameter of 100 nm is used as the indenter. The indentation motion along the Z-direction is generated by a PZT actuator. The sample is mounted on the free-end of a steel cantilever. The indentation depth and load can be accurately obtained from the PZT displacement, cantilever spring constant and the cantilever deflection measured by a capacitance-type displacement sensor. Nanoindentation experiments are carried out on an aluminium sample in the vacuum chamber of a scanning electronic microscope. Experimental results demonstrate that the instrument has the ability to perform nanoindentation.
|ジャーナル||Measurement Science and Technology|
|出版ステータス||Published - 2006 3月 1|
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