A new air cleaning and cooling instrument using oblique honeycomb

S. Minobe, I. Terada, Y. Motoyoshi, H. Hanaoka, Y. Shirai, T. Ohmi

研究成果: Conference contribution

抄録

A new instrument with unified fonctions of washing and cooling for the intake air to clean rooms was studied. Its structure is based on oblique honeycombs made of high purity alumina as contact media of air to water. The alumina medium releases less contaminant to pure water than the conventional. The instrument showed high efficiencies in air cooling as well as removal of inorganic chemicals in the air. These resulted in the shortening of their lengths, reducing the amount of recycling water and consequently lowering the pressure loss upon the air treatment. The new instrument can provide very clean environments with low operation costs.

本文言語English
ホスト出版物のタイトルISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing
ページ417-420
ページ数4
DOI
出版ステータスPublished - 2006 12月 1
イベントISSM 2006 - 15th International Symposium on Semiconductor Manufacturing - Tokyo, Japan
継続期間: 2007 9月 252007 9月 27

出版物シリーズ

名前IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN(印刷版)1523-553X

Other

OtherISSM 2006 - 15th International Symposium on Semiconductor Manufacturing
国/地域Japan
CityTokyo
Period07/9/2507/9/27

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 工学(全般)
  • 産業および生産工学
  • 電子工学および電気工学

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