抄録
A new two-axis Lloyd's mirror interferometer based on multi-beam interference is proposed. A square grating substrate with normal in the Z-axis is placed edge to edge with two rectangular mirrors with normals parallel to the XZ-plane (X-mirror) and the YZ-plane (Y-mirror), respectively. The angle between the substrate and each mirror is set to be larger than 90°, so that the beams reflected by the mirrors can be superimposed with the direct beam at the substrate to produce two-dimensional (2D) diffraction grating structures in a single exposure. Sub-micron pitched 2D hole grating structures were fabricated and evaluated.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 461-464 |
| ページ数 | 4 |
| ジャーナル | CIRP Annals - Manufacturing Technology |
| 巻 | 63 |
| 号 | 1 |
| DOI | |
| 出版ステータス | Published - 2014 |
ASJC Scopus subject areas
- 機械工学
- 産業および生産工学