抄録
Adsorption kinetics of dimethylsilane (DMS) at Si(0 0 1) surface has been investigated by using temperature-programmed desorption (TPD). The saturated hydrogen coverage of two monolayer was identical with that from monomethylsilane (MMS)-saturated surface. By being combined with the C/H ratios within a molecule (1/6 for MMS and 1/4 for DMS), this fact suggests enhanced C incorporation by DMS as compared with MMS by a factor of 1.5. The TPD spectra are deconvoluted into β 1 (∼510°C), β′ 1 (∼550°C), γ (∼615°C) and δ (∼910°C) peaks. The appearance of the bulk C-related γ peak from the very initial adsorption, in contrast to MMS, is consistent with the enhanced C incorporation. Although the hydrogen uptake (H-uptake) curve is quantitatively fitted with the four-site adsorption model, discussions on the sub-peak assignments suggest presence of further decompositions of ad-species at initial adsorptions.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 183-187 |
| ページ数 | 5 |
| ジャーナル | Applied Surface Science |
| 巻 | 224 |
| 号 | 1-4 |
| DOI | |
| 出版ステータス | Published - 2004 3月 15 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 化学 (全般)
- 凝縮系物理学
- 物理学および天文学（全般）
- 表面および界面
- 表面、皮膜および薄膜