Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes

Roman Forke, Takashiro Tsukamoto, Alexey Shaporin, Sebastian Weidlich, Daniel Bulz, Susann Hahn, Shuji Tanaka, Karla Hiller

研究成果: 書籍の章/レポート/Proceedings会議への寄与査読

1 被引用数 (Scopus)

抄録

Within this paper we report on our development from a MEMS vibrating tuning fork gyroscope to a ring gyroscope with additional comb electrodes for enhanced sensitivity. Since we started from the classical tuning fork gyroscope, we combined elements from this topology with the typical ring structure. We have chosen the ring structure because of the inherent structural equality of the modes and its use for later advanced compensation techniques. This paper presents the design, fabrication and operation of this MEMS ring gyroscope. The results are extracted from measurements with our standard split-mode operation and a fully tuned FM operational mode with independently controlled superposed clockwise and counter clockwise modes.

本文言語英語
ホスト出版物のタイトルINERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9798350316698
DOI
出版ステータス出版済み - 2024
イベント11th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2024 - Hiroshima, 日本
継続期間: 2024 3月 252024 3月 28

出版物シリーズ

名前INERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

会議

会議11th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2024
国/地域日本
CityHiroshima
Period24/3/2524/3/28

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