An Improved Data Processing Algorithm for Spectrally Resolved Interferometry Using a Femtosecond Laser

Tao Liu, Hiraku Matsukuma, Amane Suzuki, Ryo Sato, Wei Gao

研究成果: ジャーナルへの寄稿学術論文査読

抄録

Spectrally resolved interferometry utilizing a femtosecond laser is widely employed for absolute distance measurement. However, deviations in the output time pulse of the conventional algorithm through inverse Fourier transform are inevitable. Herein, an improved data processing algorithm employing a time-shifting parameter is proposed to improve the accuracy of spectrally resolved interferometry. The principle of the proposed time-shifting algorithm is analyzed theoretically after clarifying the deviation source of the conventional algorithm. Simulation and experimental work were conducted to indicate the improvement in the accuracy of the output absolute distance. The results demonstrated that the proposed algorithm could reduce the deviation of output distances towards the reference values, reaching 0.58 μm by half compared to the conventional algorithm. Furthermore, the measurement uncertainty was evaluated using the Guide to the Expression of Uncertainty in Measurement (GUM), resulting in an expanded uncertainty of 0.71 μm with a 95% confidence.

本文言語英語
論文番号2869
ジャーナルSensors
24
9
DOI
出版ステータス出版済み - 2024 5月

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